FPD・半導体製造の最先端技術に役立つ次世代静電チャックHTPSの設計開発

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Company Information

会社全景 2.psd

Company Name
TSUKUBA SEIKO Co.,Ltd.
Address
2168-10, Aza Ganjoh-ji, Oaza Kamikamou, Kaminokawa-machi, Kawauchi-gun, Tochigi-pref, 329-0617, Japan
Business Lines
Development, manufacture and sale of electrostatic clamping systems
President
Fow-Lai POH
Established
June 27, 1985
Capital
907,300 thousand yen
Main Banks
Sumitomo Mitsui Banking Corporation Oyama Branch
Ashikaga Bank Moka Branch
Reasona Bank, Limited Utsunomiya Branch

management concept

Tsukuba Seiko always faces technological changes and strives to grow continuously to provide the greatest products and services which meet all customers’ demands.
We are conscious of our social responsibility and contribute to creating better societies and environments in order to keep high corporate ethics and to be always trusted. Moreover, we build a fresh corporate culture to facilitate self-realization.

Business Lines

_MG_6783.jpgOur products have achieved satisfactory results in the area of cutting-edge technology as tools for vacuum environments and handling thin materials that are difficult to clamp such as large thin glass substrates, films, foils, wafers, porosity materials and paper, etc.
_MG_6832.jpgFor your technical innovation, yield enhancement and improvement of the productive efficiency, we make from trial products to mass produced products from 1P in accordance with your required specifications.
Feel free to contact us.

Corporate history

1985
Established on June 27, 1985
1988~2004
Sales of semiconductor equipments
DIP scanner, T/F facility
Lead reformer, Auto-mold system
Wire-bonding inspection system
2002
Started sales of electrostatic chucks.
2003
Started sales of ESCs that can deal with G4 and G5 substrates for liquid crystal manufacturing equipment ODF
2004
Started sales of ESCs that can deal with G6 and G7 substrates for ODF
2006
Moved to Kaminokawa-machi, Kawauchi-gun, Tochigi-pref.
Acquired certification of "Plan of development in new coordinated business field for a different type of business" for "Industrialization of ESCs that handles liquid crystals, etc." by Kanto Bureau of Economy, Trade and Industry
2007
Started sales of electrostatic chucks that can deal with G8 substrates for ODF
2009
To be selected as "300 small and medium enterprises that support innovation in Japan" of Ministry of Economy, Trade and Industry
2013
Started sales of wafer supporter for thin wafers
2018

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