FPD・半導体製造の最先端技術に役立つ次世代静電チャックHTPSの設計開発

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HPTS is used in various industries.

HPTS is adopted in various facilities, production sites and laboratories.

liquid crystal panels
organic EL , touch panels
semiconductor wafers
wafers for solar cells
HDDs , fuel cells
printed circuit boards
printing machines etc.

stages for bonding equipments
stages for deposition equipments
stages for exposure equipments
stages for inspection equipments
transfer equipments
stages for printing machines
stages for coating applicators, etc.

glass substrates , silicon wafers
compound wafers , copper foils
films , printed circuit boards
FPC sheets , filters
film conductors , film insulators
paper , ceramic sheets

使用例01.psd
transfer of glass substrates

使用例02.psd
transfer of semiconductor wafers

使用例03.psd
transfer of films and paper

使用例04.psd
transfer of substrates

使用例05.psd
transfer of DVDs, etc.

In addition to the above, HPTS can clamp objects with an uneven surface, porosity or breathability, and be also used in vacuum environments.

Products

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Thin Hand
ESCs for installing on automatic machines

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Cordless Holder
Buttery-powered cordless ESCs for coating equipments and in-line facilities
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Wafer Supporter
Reinforcing plates for wafers, foils, etc.

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WaferHand
Point-contact wafer hands that realize stable transfers even in vacuum environments
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Electrostatic Belt
Electrostatic transfer belts that can reel out paper, bills, etc. independent of their thickness
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Soft Palm
Handheld ESCs


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