An electrostatic chuck (ESC) is a tool which clamps an object with the force generated between the electrode and the object by applying a voltage to the electrode.
Tsukuba Seiko’s ESC, HPTS, realizes the strongest clamping power under the lowest voltage in ESCs using Coulomb force.
Tsukuba Seiko designs and develops tools based on original ESC technology for the cutting-edge technology field of FPD and semiconductor manufacturing.
What is an ESC｜Product guidance
Examples of use of HPTS
transfer of glass substrates
transfer of semiconductor wafers
transfer of films and paper
transfer of substrates
transfer of DVDs, etc.
In addition to the above, HPTS can clamp objects with an uneven surface, porosity or breathability, and be also used in vacuum environments.