FPD・半導体製造の最先端技術に役立つ次世代静電チャックHTPSの設計開発

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October, 2011  Renewal of Tsukuba Seiko homepage

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An electrostatic chuck (ESC) is a tool which clamps an object with the force generated between the electrode and the object by applying a voltage to the electrode.
Tsukuba Seiko’s ESC, HPTS, realizes the strongest clamping power under the lowest voltage in ESCs using Coulomb force.
Tsukuba Seiko designs and develops tools based on original ESC technology for the cutting-edge technology field of FPD and semiconductor manufacturing.
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Examples of use of HPTS

使用例01.psd
transfer of glass substrates

使用例02.psd
transfer of semiconductor wafers

使用例03.psd
transfer of films and paper

使用例04.psd
transfer of substrates

使用例05.psd
transfer of DVDs, etc.

In addition to the above, HPTS can clamp objects with an uneven surface, porosity or breathability, and be also used in vacuum environments.

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