FPD・半導体製造の最先端技術に役立つ次世代静電チャックHTPSの設計開発

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Product Outline

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Point-contact wafer hand
Wafer Hand is best for transferring warped wafers.

Wafer Hand is a point-contact transfer hand that can clamp wafers with Coulomb force and realizes stable rapid transfer in vacuum environments.
The contact area of an object can be minimized because of the point-contact feature.

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Introduction example

● Transfer hands for wafers, silicon wafers and compound wafers

Features

● Clamp warped wafers stably that are hard to clamp with a vacuum clamp.
● Available in air and vacuum environments
● The contact area of an object can be minimized because of the point-contact feature.

Specifications

Wafer size
8" & 12"
Contents
A main body of Wafer Hand and a dedicated
Control
Electric control with a dedicated controller
Operating environments
Air and vacuum
Clamping force
4000gf (Max) variable

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