FPD・半導体製造の最先端技術に役立つ次世代静電チャックHTPSの設計開発

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Product Outline



A wafer supporter for thin wafers
Thin Wafer Supporter is recommended for those who have trouble reinforcing thin wafers and correcting the warpage of them.

Thin Wafer Supporter can reinforce and clamp thin wafers by electric control, and be applied to various processes while clamping because of the cordless feature.
Thin Wafer Supporter can be used for reinforcing wafers for memory and solar cells, copper foils, stainless films, etc.
There is no running cost because Thin Wafer Supporter can be used almost permanently.

Introduction example

● semiconductor wafers , silicon wafers , compound wafers , reinforcing plates for transfer between processes
● Reinforcing plates for transfer of film conductors
● Stages for spin coaters

Features

● Reinforce and clamp thin wafers by electric control without glue.
● Wafers will not be broken during unclamped due to without forcible separation force.
● Application to various processes while clamping because of the cordless feature.
● Thin Wafer Supporter is so thin that it can be applied to carriers while clamping wafers.

Specifications

Contents
A supporting plate and a dedicated controller
Thickness of supporting plate
0.55mm ~ requested sizes
Control
Electric control with a dedicated controller
Clamping condition
Cordless
Operating environments
Air and vacuum
Objects to be clamped
Conductors ~ semiconductors
Clamping force
150gf/cm^2

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